Invention Grant
- Patent Title: Focus-less inspection apparatus and method
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Application No.: US17123901Application Date: 2020-12-16
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Publication No.: US11360031B2Publication Date: 2022-06-14
- Inventor: Chan Kwon Lee , Moon Young Jeon , Jung Hur , Deok Hwa Hong , Eun Ha Jo
- Applicant: KOH YOUNG TECHNOLOGY INC.
- Applicant Address: KR Seoul
- Assignee: KOH YOUNG TECHNOLOGY INC.
- Current Assignee: KOH YOUNG TECHNOLOGY INC.
- Current Assignee Address: KR Seoul
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2018-0122354 20181015,KR10-2018-0159872 20181212
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01N21/47

Abstract:
The present disclosure proposes an inspection apparatus. The inspection apparatus may include: a structured-light source configured to sequentially radiate a plurality of structured lights having one phase range; a lens configured to adjust, for each of the plurality of structured lights, optical paths of light beams corresponding to phases of the phase range such that a light beam corresponding to one phase of the phase range arrives at each point of a partial region on an object; an image sensor configured to capture a plurality of reflected lights generated by the structured lights being reflected from the partial region; and a processor configured to acquire a light quantity value of the reflected lights; and derive an angle of the surface by deriving phase values of the reflected lights based on the light quantity value for the reflected lights.
Public/Granted literature
- US20210102903A1 FOCUS-LESS INSPECTION APPARATUS AND METHOD Public/Granted day:2021-04-08
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