Invention Grant
- Patent Title: Extreme ultraviolet light generation system and electronic device manufacturing method
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Application No.: US17337560Application Date: 2021-06-03
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Publication No.: US11366390B2Publication Date: 2022-06-21
- Inventor: Takanari Kobayashi , Hirokazu Hosoda , Yoshiyuki Honda
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JPJP2020-129666 20200730
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00 ; H01L21/027

Abstract:
An extreme ultraviolet light generation system may include a laser system emitting first prepulse laser light, second prepulse laser light, and main pulse laser light in this order; a chamber including at least one window for introducing, into the chamber, the first prepulse laser light, the second prepulse laser light, and the main pulse laser light; a target supply unit supplying a target to a predetermined region in the chamber; and a processor controlling the laser system to irradiate the target with the first prepulse laser light, irradiate the target, having been irradiated with the first prepulse laser light, with the second prepulse laser light having a pulse time width longer than a pulse time width of the main pulse laser light, and irradiate the target, having been irradiated with the second prepulse laser light, with the main pulse laser light temporally separated from the second prepulse laser light.
Public/Granted literature
- US20220035249A1 EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2022-02-03
Information query
IPC分类: