Invention Grant
- Patent Title: Thin film core-shell fin and nanowire transistors
-
Application No.: US16604146Application Date: 2017-06-20
-
Publication No.: US11380797B2Publication Date: 2022-07-05
- Inventor: Gilbert Dewey , Van H. Le , Abhishek A. Sharma , Shriram Shivaraman , Ravi Pillarisetty , Tahir Ghani , Jack T. Kavalieros
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2017/038385 WO 20170620
- International Announcement: WO2018/236359 WO 20181227
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/786 ; H01L27/12 ; H01L29/06 ; H01L29/22 ; H01L29/417

Abstract:
Thin film core-shell fin and nanowire transistors are described. In an example, an integrated circuit structure includes a fin on an insulator layer above a substrate. The fin has a top and sidewalls. The fin is composed of a first semiconducting oxide material. A second semiconducting oxide material is on the top and sidewalls of the fin. A gate electrode is over a first portion of the second semiconducting oxide material on the top and sidewalls of the fin. A first conductive contact is adjacent the first side of the gate electrode, the first conductive contact over a second portion of the second semiconducting oxide material on the top and sidewalls of the fin. A second conductive contact is adjacent the second side of the gate electrode, the second conductive contact over a third portion of the second semiconducting oxide material on the top and sidewalls of the fin.
Information query
IPC分类: