Invention Grant
- Patent Title: Apparatus and method for removing bubbles in flexible substrate
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Application No.: US16471498Application Date: 2019-04-17
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Publication No.: US11420228B2Publication Date: 2022-08-23
- Inventor: Haiyang Shen
- Applicant: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Hubei
- Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Hubei
- Priority: CN201910089172.3 20190130
- International Application: PCT/CN2019/083035 WO 20190417
- International Announcement: WO2020/155409 WO 20200806
- Main IPC: B05D3/04
- IPC: B05D3/04 ; B05D3/02 ; C03C17/32 ; H01L51/56

Abstract:
The present disclosure provides an apparatus for removing bubbles in a flexible substrate. The flexible substrate includes a baseplate and a polyimide layer coated on the baseplate. The apparatus includes a chamber including a top wall, a sidewall, and a bottom wall, wherein the top wall, the sidewall, and the bottom wall define an accommodation space; a heating plate disposed in the accommodation space; and a cooling conduit embedded in at least one of the top wall and the sidewall of the chamber.
Public/Granted literature
- US20210362184A1 APPARATUS AND METHOD FOR REMOVING BUBBLES IN FLEXIBLE SUBSTRATE Public/Granted day:2021-11-25
Information query