Invention Grant
- Patent Title: Ion gun and vacuum processing apparatus
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Application No.: US17828312Application Date: 2022-05-31
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Publication No.: US11521822B2Publication Date: 2022-12-06
- Inventor: Tsutomu Hiroishi
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki
- Assignee: CANON ANELVA CORPORATION
- Current Assignee: CANON ANELVA CORPORATION
- Current Assignee Address: JP Kawasaki
- Agency: Venable LLP
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/305

Abstract:
An ion gun including an anode, a cathode opposed to the anode and having a first portion and a second portion, and a magnet configured to form a magnetic field space between the first portion and the second portion. An annular gap including a linear portion and a curved portion is provided between the first portion and the second portion of the cathode. The magnet is configured to form, between the first portion and the second portion of the curved portion, a magnetic field line having a bottom inside a cross-sectional centerline of the gap.
Public/Granted literature
- US20220301807A1 ION GUN AND VACUUM PROCESSING APPARATUS Public/Granted day:2022-09-22
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