Invention Grant
- Patent Title: High electron mobility transistor (HEMT) with RESURF junction
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Application No.: US16629156Application Date: 2018-07-06
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Publication No.: US11522078B2Publication Date: 2022-12-06
- Inventor: Rohith Soman , Ankit Soni , Mayank Shrivastava , Srinivasan Raghavan , Navakant Bhat
- Applicant: Indian Institute of Science
- Applicant Address: IN Karnataka Bangalore
- Assignee: Indian Institute of Science
- Current Assignee: Indian Institute of Science
- Current Assignee Address: IN Karnataka Bangalore
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Priority: IN201741024073 20170707
- International Application: PCT/IN2018/050438 WO 20180706
- International Announcement: WO2019/008603 WO 20190110
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/06 ; H01L29/20 ; H01L29/205 ; H01L29/40 ; H01L29/423

Abstract:
A High Electron Mobility Transistor (HEMT) having a reduced surface field (RESURF) junction is provided. The HEMT includes a source electrode at a first end and a drain electrode at a second end. A gate electrode is provided between the source electrode and the drain electrode. A reduced surface field (RESURF) junction extends from the first end to the second end. The gate electrode is provided above the RESURF junction. A buried channel layer is formed in the RESURF junction on application of a positive voltage at the gate electrode. The RESURF junction includes an n-type Gallium nitride (GaN) layer and a p-type GaN layer. The n-type GaN layer is provided between the p-type GaN layer and the gate electrode.
Public/Granted literature
- US20200227543A1 HIGH ELECTRON MOBILITY TRANSISTOR (HEMT) WITH RESURF JUNCTION Public/Granted day:2020-07-16
Information query
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