Invention Grant
- Patent Title: Probing apparatus
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Application No.: US16892076Application Date: 2020-06-03
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Publication No.: US11536765B2Publication Date: 2022-12-27
- Inventor: Kang-Yen Fu , Ya-Hung Lo , Shou-Jen Tsai , Wei-Cheng Ku
- Applicant: MPI Corporation
- Applicant Address: TW Hsinchu County
- Assignee: MPI Corporation
- Current Assignee: MPI Corporation
- Current Assignee Address: TW Hsinchu County
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW108121160 20190618
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L21/67 ; G01R1/073

Abstract:
A probing apparatus includes a frame, a testing device, a rotatable testing platform, and a probe module. The testing device is disposed on the frame and is displaceable along an X direction and a Y direction perpendicular to the X direction. The rotatable testing platform is disposed on the frame and is rotatable around a rotating axis extending in the X direction. A direction perpendicular to the X direction and the Y direction is a Z direction, and the rotatable testing platform and the testing device are located at different positions of the Z direction. The probe module is disposed on the rotatable testing platform.
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