Invention Grant
- Patent Title: CFET SRAM bit cell with three stacked device decks
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Application No.: US17139303Application Date: 2020-12-31
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Publication No.: US11545497B2Publication Date: 2023-01-03
- Inventor: Daniel Chanemougame , Lars Liebmann , Jeffrey Smith
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/092 ; H01L29/06 ; H01L29/423 ; H01L29/786 ; H01L21/02 ; H01L21/8238 ; H01L29/66

Abstract:
A static random access memory (SRAM) structure is provided. The structure includes a plurality of SRAM bit cells on a substrate. Each SRAM bit cell includes at least six transistors including at least two NMOS transistors and at least two PMOS transistors. Each of the six transistors is being lateral gate-all-around transistors in that gates wraps all around a cross section of channels of the at least six transistors. The at least six transistors positioned in three decks in which a third deck is positioned vertically above a second deck, and the second deck is positioned vertically above a first deck relative to a working surface of the substrate. A first inverter is formed using a first transistor positioned in the first deck and a second transistor positioned in the second deck. A second inverter is formed using a third transistor positioned in the first deck and a fourth transistor positioned in the second deck. A pass gate is located in the third deck.
Public/Granted literature
- US20210202500A1 CFET SRAM BIT CELL WITH THREE STACKED DEVICE DECKS Public/Granted day:2021-07-01
Information query
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