- Patent Title: Tuneable uniformity control utilizing rotational magnetic housing
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Application No.: US16993759Application Date: 2020-08-14
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Publication No.: US11557466B2Publication Date: 2023-01-17
- Inventor: Samuel E. Gottheim , Abhijit B. Mallick , Pramit Manna , Eswaranand Venkatasubramanian , Timothy Joseph Franklin , Edward Haywood , Stephen C. Garner , Adam Fischbach
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: C23C16/509
- IPC: C23C16/509 ; H01J37/32

Abstract:
Embodiments described herein provide magnetic and electromagnetic housing systems and a method for controlling the properties of plasma generated in a process volume of a process chamber to affect deposition properties of a film. In one embodiment, the method includes rotation of the rotational magnetic housing about a center axis of the process volume to create dynamic magnetic fields. The magnetic fields modify the shape of the plasma, concentration of ions and radicals, and movement of concentration of ions and radicals to control the density profile of the plasma. Controlling the density profile of the plasma tunes the uniformity and properties of a deposited or etched film.
Public/Granted literature
- US20210050189A1 TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING Public/Granted day:2021-02-18
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