Invention Grant
- Patent Title: Gas delivery system for ion implanter
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Application No.: US16882053Application Date: 2020-05-22
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Publication No.: US11569062B2Publication Date: 2023-01-31
- Inventor: Hom-Chung Lin , Jih-Churng Twu , Yi-Ting Chang , Chao-Po Lu , Tsung-Min Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed IP Law Group LLP
- Main IPC: H01J37/31
- IPC: H01J37/31 ; H01J37/317 ; H01J37/08 ; H01J37/32

Abstract:
An ion implantation system includes an ion implanter containing an ion source unit and a dopant source gas supply system. The system includes a dopant source gas storage tank inside a gas box container located remotely to the ion implanter and a dopant source gas supply pipe configured to supply a dopant source gas from the dopant source gas storage tank to the ion source unit. The dopant source gas supply pipe includes an inner pipe, an outer pipe enclosing the inner pipe, a first pipe adaptor coupled to first end of respective inner and outer pipes, and a second pipe adaptor coupled to seconds end of respective inner and outer pipes opposite the first end. The first pipe adaptor connects the inner pipe to the dopant source gas storage tank and the second pipe adaptor connects the inner pipe to the ion source unit.
Public/Granted literature
- US20210366690A1 GAS DELIVERY SYSTEM FOR ION IMPLANTER Public/Granted day:2021-11-25
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