Invention Grant
- Patent Title: Substrate treatment method and substrate treatment apparatus
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Application No.: US16845178Application Date: 2020-04-10
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Publication No.: US11571709B2Publication Date: 2023-02-07
- Inventor: Teppei Takahashi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JPJP2019-082290 20190423
- Main IPC: B05D1/00
- IPC: B05D1/00 ; B05D3/10 ; H01L21/67 ; H01L21/027 ; G03F7/16 ; H01L23/31 ; H01L23/29

Abstract:
A substrate treatment method for treating a substrate, includes: (a) applying a coating solution to a front surface of the substrate by a spin coating method to form a coating film; (b) supplying a solvent for the coating solution to a projection of the coating film formed at a front surface peripheral edge of the substrate at (a); and (c) rotating the substrate in a state where the supply of the solvent is stopped, to move a top of the projection to an outside in a radial direction of the substrate. (b) and (c) are repeatedly performed. The projection is a buildup of the coating solution protruding from the coating film.
Public/Granted literature
- US20200338589A1 SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS Public/Granted day:2020-10-29
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