Invention Grant
- Patent Title: Optical device
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Application No.: US16625693Application Date: 2018-07-06
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Publication No.: US11629947B2Publication Date: 2023-04-18
- Inventor: Tomofumi Suzuki , Kyosuke Kotani , Tatsuya Sugimoto , Yutaka Kuramoto , Katsumi Shibayama , Noburo Hosokawa
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JPJP2017-133089 20170706
- International Application: PCT/JP2018/025646 WO 20180706
- International Announcement: WO2019/009403 WO 20190110
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01B9/02 ; B81B3/00 ; G01J3/10 ; G01J3/14 ; G01J3/45 ; G02B7/182 ; G02B26/08 ; G02B27/14 ; G01J3/453

Abstract:
In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.
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