Invention Grant
- Patent Title: Extreme ultraviolet light source apparatus and plasma position adjusting method
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Application No.: US17225595Application Date: 2021-04-08
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Publication No.: US11631579B2Publication Date: 2023-04-18
- Inventor: Noritaka Ashizawa
- Applicant: Ushio Denki Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2020-072797 20200415
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01J61/06 ; H01J61/02 ; H01J61/28

Abstract:
An extreme ultraviolet light source apparatus includes a disc-shaped cathode rotating about an axis, a disc-shaped anode rotating about an axis, an energy beam irradiation device irradiating a plasma raw material on the cathode with an energy beam to vaporize the plasma raw material, a power supply for causing a discharge between the cathode and the anode for generating a plasma in the gap between the cathode and the anode to emit extreme ultraviolet light, and an irradiation position adjusting mechanism for adjusting a position at which the cathode is irradiated with the energy beam. The cathode, the anode, and the irradiation position adjusting mechanism are accommodated in a housing. A photography device is disposed outside the housing and is configured to photograph a visible-light image of a vicinity of the cathode and the anode, the vicinity including visible light emitted from the plasma.
Public/Granted literature
- US20210327701A1 EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND PLASMA POSITION ADJUSTING METHOD Public/Granted day:2021-10-21
Information query
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