Invention Grant
- Patent Title: Method for detector equalization during the imaging of objects with a multi-beam particle microscope
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Application No.: US17192637Application Date: 2021-03-04
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Publication No.: US11645740B2Publication Date: 2023-05-09
- Inventor: Dirk Zeidler , Michael Behnke , Stefan Schubert , Christof Riedesel
- Applicant: Carl Zeiss MultiSEM GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE 2018007455.3 2018.09.21
- Main IPC: G06T5/00
- IPC: G06T5/00 ; H01J37/00 ; G06T5/40 ; G06T5/50 ; H01J37/244 ; H01J37/28
Abstract:
A method for detector equalization during the imaging of objects with a multi-beam particle microscope includes performing an equalization on the basis of individual images in or on the basis of overlap regions. For detector equalization, contrast values and/or brightness values are used and iterative methods can be employed.
Public/Granted literature
- US20210192700A1 METHOD FOR DETECTOR EQUALIZATION DURING THE IMGAGING OF OBJECTS WITH A MULTI-BEAM PARTICLE MICROSCOPE Public/Granted day:2021-06-24
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