- Patent Title: Apparatus for transmission electron microscopy cathodoluminescence
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Application No.: US17223146Application Date: 2021-04-06
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Publication No.: US11688581B2Publication Date: 2023-06-27
- Inventor: John Andrew Hunt , Michael Bertilson
- Applicant: Gatan, Inc.
- Applicant Address: US CA Pleasanton
- Assignee: GATAN, INC.
- Current Assignee: GATAN, INC.
- Current Assignee Address: US CA Pleasanton
- Agency: Volpe Koenig
- Main IPC: H01J37/244
- IPC: H01J37/244 ; G01J3/02 ; G01J3/44 ; G01N21/66 ; H01J37/22 ; H01J37/285

Abstract:
Apparatuses for collection of upstream and downstream transmission electron microscopy (TEM) cathodoluminescence (CL) emitted from a sample exposed to an electron beam are described. A first fiber optic cable carries first CL light emitted from a first TEM sample surface, into a spectrograph. A second fiber optic cable carries second CL light emitted from a second TEM sample surface into the spectrograph. The first and second fiber optic cables are positioned such that the spectrograph produces a first light spectrum for the first fiber optic cable and a separate light spectrum for the second fiber optic cable. The described embodiments allow collection of TEM CL data in a manner that allows analyzing upstream and downstream TEM CL signals separately and simultaneously with an imaging spectrograph.
Public/Granted literature
- US20210313141A1 APPARATUS FOR TRANSMISSION ELECTRON MICROSCOPY CATHODOLUMINESCENCE Public/Granted day:2021-10-07
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