Invention Grant
- Patent Title: Charged particle beam drawing device and method of controlling charged particle beam drawing device
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Application No.: US17400580Application Date: 2021-08-12
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Publication No.: US11694875B2Publication Date: 2023-07-04
- Inventor: Masakazu Iwanaga
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP 2020136930 2020.08.14
- Main IPC: H01J37/302
- IPC: H01J37/302 ; G06F3/0482 ; G06F3/04847

Abstract:
A charged particle beam drawing device includes: a storage unit that stores a pattern generation program for generating pattern data, the pattern generation program being a program in which an instruction for specifying a type of a figure and an instruction for specifying a regular arrangement of the figure are described; an execution unit that executes the pattern generation program stored in the storage unit; and a control unit that performs drawing control based on the pattern data generated by the executed pattern generation program.
Information query