Invention Grant
- Patent Title: MEMS transducer
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Application No.: US17840131Application Date: 2022-06-14
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Publication No.: US11697582B2Publication Date: 2023-07-11
- Inventor: Stephane Leahy , Wan-Thai Hsu , Mohsin Nawaz , Carly Stalder , Sahil Gupta , Meysam Daeichin
- Applicant: Soundskrit Inc.
- Applicant Address: CA Montreal
- Assignee: Soundskrit Inc.
- Current Assignee: Soundskrit Inc.
- Current Assignee Address: CA Montreal
- Agency: Lempia Summerfield Katz LLC
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/02 ; H04R19/04

Abstract:
A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.
Public/Granted literature
- US20220396470A1 MEMS TRANSDUCER Public/Granted day:2022-12-15
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