LEAKAGE PATH DETECTION IN ACOUSTIC SENSOR MODULES

    公开(公告)号:US20250056173A1

    公开(公告)日:2025-02-13

    申请号:US18797363

    申请日:2024-08-07

    Abstract: An acoustic sensor module includes an acoustic sensor device including a transducer and an enclosure configured to encapsulate and seal the acoustic sensor device within the enclosure. The enclosure includes a first sound port configured to couple a first side of the transducer to an embodiment environment via a first acoustic channel formed in the enclosure. The enclosure also includes a second sound port configured to couple a second side of the transducer to the embodiment environment via a second acoustic channel formed in the enclosure. The enclosure additionally includes a notch formed on a surface of the enclosure. The notch is configured to enable detection of a leakage path, within the enclosure, between the first sound port and the second sound port around an outside of the acoustic sensor device.

    DIFFERENTIAL DIRECTIONAL ACOUSTIC SENSOR DEVICE

    公开(公告)号:US20250122072A1

    公开(公告)日:2025-04-17

    申请号:US18913431

    申请日:2024-10-11

    Abstract: An acoustic sensor device includes a substrate and a first transducer supported by the substrate, the first transducer configured to generate a first output signal when exposed to a sound wave. The acoustic sensor device also include a second transducer supported by the substrate, the second transducer configured to generate a second output signal when exposed to a sound wave. The first transducer and the second transducer are configured such that the first output signal generated by the first transducer and the second output signal generated by the second transducer are opposite in polarity.

    MEMS TRANSDUCER
    4.
    发明申请

    公开(公告)号:US20220396470A1

    公开(公告)日:2022-12-15

    申请号:US17840131

    申请日:2022-06-14

    Abstract: A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.

    Multiple layer electrode transducers

    公开(公告)号:US12139394B2

    公开(公告)日:2024-11-12

    申请号:US17237814

    申请日:2021-04-22

    Abstract: An electrostatic transducer includes a substrate oriented in a plane, a fixed electrode supported by the substrate, and a moveable electrode supported by the substrate, spaced from the fixed electrode in a first direction parallel to the plane, and configured for movement in a second direction transverse to the plane, such that an extent to which the fixed and moveable electrodes overlap changes during the movement. The fixed and moveable electrodes comprise one or more of a plurality of conductive layers, the plurality of conductive layers including at least three layers. The fixed electrode includes a stacked arrangement of two or more spaced apart conductive layers of the plurality of conductive layers.

    MULTIPLE LAYER ELECTRODE TRANSDUCERS

    公开(公告)号:US20210331912A1

    公开(公告)日:2021-10-28

    申请号:US17237814

    申请日:2021-04-22

    Abstract: An electrostatic transducer includes a substrate oriented in a plane, a fixed electrode supported by the substrate, and a moveable electrode supported by the substrate, spaced from the fixed electrode in a first direction parallel to the plane, and configured for movement in a second direction transverse to the plane, such that an extent to which the fixed and moveable electrodes overlap changes during the movement. The fixed and moveable electrodes comprise one or more of a plurality of conductive layers, the plurality of conductive layers including at least three layers. The fixed electrode includes a stacked arrangement of two or more spaced apart conductive layers of the plurality of conductive layers.

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