Invention Grant
- Patent Title: Methods for depositing blocking layers on conductive surfaces
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Application No.: US17315223Application Date: 2021-05-07
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Publication No.: US11702733B2Publication Date: 2023-07-18
- Inventor: Lakmal C. Kalutarage , Bhaskar Jyoti Bhuyan , Aaron Dangerfield , Feng Q. Liu , Mark Saly , Michael Haverty , Muthukumar Kaliappan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C23C16/04
- IPC: C23C16/04 ; C23C16/02 ; H01L21/02 ; H01L21/32 ; C23C16/56

Abstract:
Methods of selectively depositing blocking layers on conductive surfaces over dielectric surfaces are described. In some embodiments, a 4-8 membered substituted heterocycle is exposed to a substrate to selectively form a blocking layer. In some embodiments, a layer is selectively deposited on the dielectric surface after the blocking layer is formed. In some embodiments, the blocking layer is removed.
Public/Granted literature
- US20220372616A1 METHODS FOR DEPOSITING BLOCKING LAYERS ON CONDUCTIVE SURFACES Public/Granted day:2022-11-24
Information query
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