Invention Grant
- Patent Title: Graded interface in Bragg reflector
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Application No.: US17708593Application Date: 2022-03-30
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Publication No.: US11720013B2Publication Date: 2023-08-08
- Inventor: Wen Xiao , Vibhu Jindal , Weimin Li , Shuwei Liu
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- The original application number of the division: US16850665 2020.04.16
- Main IPC: G03F1/24
- IPC: G03F1/24 ; G02B5/08 ; G03F7/00 ; G03F7/20
Abstract:
A multilayer stack in the form of a Bragg reflector comprising a graded interfacial layer and a method of manufacturing are disclosed. The graded interfacial layer eliminates the formation of low-reflectivity interfaces in a multilayer stack and reduces roughness of interfaces in a multilayer stack.
Public/Granted literature
- US20220221786A1 Graded Interface In Bragg Reflector Public/Granted day:2022-07-14
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