Invention Grant
- Patent Title: Drying method of polyimide paste and manufacturing method of solar cell having high photoelectric conversion efficiency
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Application No.: US16759467Application Date: 2018-08-24
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Publication No.: US11742439B2Publication Date: 2023-08-29
- Inventor: Takenori Watabe , Hiroshi Hashigami , Hiroyuki Ohtsuka
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 17207107 2017.10.26
- International Application: PCT/JP2018/031330 2018.08.24
- International Announcement: WO2019/082495A 2019.05.02
- Date entered country: 2020-04-27
- Main IPC: H01L31/0224
- IPC: H01L31/0224 ; B05D3/02 ; B05D3/10 ; C08G73/10 ; C08J5/18 ; H01L31/068 ; H01L31/0216 ; H01L31/18

Abstract:
A drying method of a polyimide paste which can maintain a printing shape while maintaining productivity includes an organic solvent and a polyimide resin dissolved in the organic solvent, and which becomes cured polyimide by being cured as a result of being dried and heated, the drying method including a step of applying the polyimide paste to a surface of a base material, a step of applying a solvent including a polar material to a surface of the base material at least at a portion where the polyimide paste is applied, and a step of, after applying the solvent including the polar material, drying the polyimide paste and the solvent including the polar material.
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Information query
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