Invention Grant
- Patent Title: Apparatus for wavelength resolved angular resolved cathodoluminescence
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Application No.: US17193154Application Date: 2021-03-05
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Publication No.: US11764032B2Publication Date: 2023-09-19
- Inventor: Michael Bertilson , John Andrew Hunt , David J. Stowe
- Applicant: Gatan, Inc.
- Applicant Address: US CA Pleasanton
- Assignee: Gatan, Inc.
- Current Assignee: Gatan, Inc.
- Current Assignee Address: US CA Pleasanton
- Agency: Volpe Koenig
- The original application number of the division: US16426629 2019.05.30
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/244 ; H01J37/28

Abstract:
Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.
Public/Granted literature
- US20210210305A1 APPARATUS FOR WAVELENGTH RESOLVED ANGULAR RESOLVED CATHODOLUMINESCENCE Public/Granted day:2021-07-08
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