Invention Grant
- Patent Title: Operating a gas supply device for a particle beam device
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Application No.: US16720037Application Date: 2019-12-19
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Publication No.: US11764036B2Publication Date: 2023-09-19
- Inventor: Andreas Schmaunz
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE 2018222522.2 2018.12.20
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/145 ; H01J37/244 ; H01J37/28 ; H01J37/304

Abstract:
A gas feed device is operated, including displaying a functional parameter of the gas feed device. A gas feed device may carry out the operation, and a particle beam apparatus may include the gas feed device. A method may include predetermining and/or measuring a current temperature of a precursor reservoir of the gas feed device using a temperature measuring unit, where the precursor reservoir contains a precursor to be fed onto an object, loading a flow rate of the precursor through an outlet of the precursor reservoir from a database into a control unit, said flow rate being associated with the current temperature of the precursor reservoir, and (i) displaying the flow rate on the display unit and/or (ii) determining the functional parameter of the precursor reservoir depending on the flow rate using the control unit and informing a user of the gas feed device about the determined functional parameter.
Public/Granted literature
- US20200335309A1 OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE Public/Granted day:2020-10-22
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