• Patent Title: Method and system for broadband photoreflectance spectroscopy
  • Application No.: US17757224
    Application Date: 2020-12-08
  • Publication No.: US11802829B2
    Publication Date: 2023-10-31
  • Inventor: Yonatan OrenGilad Barak
  • Applicant: NOVA LTD.
  • Applicant Address: IL Rehovot
  • Assignee: NOVA LTD.
  • Current Assignee: NOVA LTD.
  • Current Assignee Address: IL Rehovot
  • Agency: Reches Patents
  • International Application: PCT/IL2020/051265 2020.12.08
  • International Announcement: WO2021/117035A 2021.06.17
  • Date entered country: 2022-06-11
  • Main IPC: G01N21/25
  • IPC: G01N21/25 G01N21/17
Method and system for broadband photoreflectance spectroscopy
Abstract:
Photoreflectance (PR) spectroscopy system and method for accumulating separately a “pump on” light beam and a “pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on” light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.
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