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公开(公告)号：US20250123571A1
公开(公告)日：2025-04-17
申请号：US18855303
申请日：2023-04-07
Applicant: NOVA LTD.
Inventor： Eitan A. ROTHSTEIN , Harindra VEDALA , Effi ABOODY , Noam TAL , Jacob COHEN , Michael SHIFRIN , Nir Kampel , Lilach TAMAM , Avron GER
IPC: G03F7/00
Abstract: A system and methods for OCD metrology are provided including receiving training data for training an OCD machine learning (ML) model, the training data measured from multiple wafers and including multiple pairs of corresponding input and label datasets obtained from each respective wafer. The input dataset of each pair includes multiple scatterometric datasets, measured at multiple respective locations defined by a first map. The label dataset of each pair includes one or more critical dimension (CD) parameters of respective locations defined by a second map, the second map including at least one location not in the first map. The OCD ML model is then applied to a new set of scatterometric datasets, measured from locations of a new wafer, according to the first map, to generate predicted CD parameters of locations of the second map on the new wafer.
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公开(公告)号：US12163892B2
公开(公告)日：2024-12-10
申请号：US18452494
申请日：2023-08-18
Applicant: NOVA LTD.
Inventor： Elad Schleifer , Yonatan Oren , Amir Shayari , Eyal Hollander , Valery Deich , Shimon Yalov , Gilad Barak
Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.
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公开(公告)号：US12038271B2
公开(公告)日：2024-07-16
申请号：US17790962
申请日：2021-01-07
Applicant: NOVA LTD
Inventor： Eitan A. Rothstein , Yongha Kim , Ilya Rubinovich , Ariel Broitman , Olga Krasnykov , Barak Bringoltz
CPC classification number: G01B11/30 , G03F7/70625 , G01B2210/56
Abstract: A system and methods for OCD metrology are provided including receiving training data for training an OCD machine learning (ML) model, including multiple pairs of corresponding sets of scatterometric data and reference parameters. For each of the pairs, one or more corresponding outlier metrics are by calculated and corresponding outlier thresholds are applied whether a given pair is an outlier pair. The OCD MIL model is then trained with the training data less the outlier pairs.
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公开(公告)号：US20240210322A1
公开(公告)日：2024-06-27
申请号：US18402708
申请日：2024-01-02
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad BARAK , Elad Schleifer , Yonatan OREN , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/06113 , G01N2201/0636
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up
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公开(公告)号：US11929291B2
公开(公告)日：2024-03-12
申请号：US17445727
申请日：2021-08-23
Applicant: NOVA LTD.
Inventor： Gil Loewenthal , Shay Yogev , Yoav Etzioni
CPC classification number: H01L22/26 , G01B11/24 , G01N21/9501 , H01L21/31111 , H01L21/67253 , G01B2210/56 , H10B41/27 , H10B43/27
Abstract: Controlling an etch process applied to a multi-layered structure, by calculating a spectral derivative of reflectance of an illuminated region of interest of a multi-layered structure during an etch process applied to the multi-layered structure, identifying in the spectral derivative a discontinuity that indicates that an edge of a void formed by the etch process at the region of interest has crossed a layer boundary of the multi-layered structure, determining that the crossed layer boundary corresponds to a preselected layer boundary of the multi-layered structure, and applying a predefined control action to the etch process responsive to determining that the crossed layer boundary corresponds to the preselected layer boundary of the multi-layered structure.
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Patent Agency Ranking
公开(公告)号：US20240044819A1
公开(公告)日：2024-02-08
申请号：US18346778
申请日：2023-07-03
Applicant: NOVA LTD.
Inventor： Gilad BARAK
IPC: G01N23/2055 , H01L21/66 , G06T7/00 , G06T5/00 , G01N23/201 , G01N23/20
CPC classification number: G01N23/2055 , H01L22/12 , G06T7/0004 , G06T5/002 , G01N23/201 , G01N23/20 , G01N2223/6116 , G06T2207/30148 , G06T2207/20224 , G06T2207/10116 , G01N2223/401 , G01N23/207
Abstract: A method and system are presented for use in X-ray based measurements on patterned structures. The method comprises: processing data indicative of measured signals corresponding to detected radiation response of a patterned structure to incident X-ray radiation, and subtracting from said data an effective measured signals substantially free of background noise, said effective measured signals being formed of radiation components of reflected diffraction orders such that model based interpretation of the effective measured signals enables determination of one or more parameters of the patterned structure, wherein said processing comprises: analyzing the measured signals and extracting therefrom a background signal corresponding to the background noise; and applying a filtering procedure to the measured signals to subtract therefrom signal corresponding to the background signal, resulting in the effective measured signal.
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公开(公告)号：US20240019375A1
公开(公告)日：2024-01-18
申请号：US18245161
申请日：2021-09-14
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad BARAK , Elad Schleifer , Yonatan OREN , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/0636 , G01N2201/06113
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.
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公开(公告)号：US11874606B2
公开(公告)日：2024-01-16
申请号：US18003691
申请日：2021-07-06
Applicant: NOVA LTD.
Inventor： Barak Bringoltz , Ofer Shlagman , Ran Yacoby , Noam Tal
CPC classification number: G03F7/70508 , G03F7/70625
Abstract: A system and method are presented for controlling measurements of various sample's parameters. The system comprises a control unit configured as a computer system comprising data input and output utilities, memory, and a data processor, and being configured to communicate with a measured data provider to receive measured data indicative of measurements on the sample. The data processor is configured to perform model-based processing of the measured data utilizing at least one predetermined model, and determine, for each of one or more measurements of one or more parameters of interest of the sample, an estimated upper bound on an error value for the measurement individually, and generate output data indicative thereof.
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公开(公告)号：US11802829B2
公开(公告)日：2023-10-31
申请号：US17757224
申请日：2020-12-08
Applicant: NOVA LTD.
Inventor： Yonatan Oren , Gilad Barak
CPC classification number: G01N21/1717 , G01N21/25 , G01N2021/1725
Abstract: Photoreflectance (PR) spectroscopy system and method for accumulating separately a “pump on” light beam and a “pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on” light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.
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公开(公告)号：US20230296434A1
公开(公告)日：2023-09-21
申请号：US18147682
申请日：2022-12-28
Applicant: NOVA LTD.
Inventor： Gilad BARAK , Yonatan OREN
CPC classification number: G01J3/0208 , G01J3/0224 , G01J3/06 , G01J3/10 , G01J3/2803 , G01J3/2823 , G01J3/44 , G01J2003/283
Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, said system comprising: a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory.
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