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    Accurate Raman spectroscopy
    1.
    发明授权
    Accurate Raman spectroscopy 有权

    公开(公告)号：US12163892B2

    公开(公告)日：2024-12-10

    申请号：US18452494

    申请日：2023-08-18

    Applicant: NOVA LTD.

    Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon Yalov ,  Gilad Barak

    IPC: G01J3/44 ,  G01J3/02 ,  G01N21/65

    Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

    Method and system for broadband photoreflectance spectroscopy
    2.
    发明授权
    Method and system for broadband photoreflectance spectroscopy 有权

    公开(公告)号：US11802829B2

    公开(公告)日：2023-10-31

    申请号：US17757224

    申请日：2020-12-08

    Applicant: NOVA LTD.

    Inventor： Yonatan Oren ,  Gilad Barak

    IPC: G01N21/25 ,  G01N21/17

    CPC classification number: G01N21/1717 ,  G01N21/25 ,  G01N2021/1725

    Abstract: Photoreflectance (PR) spectroscopy system and method for accumulating separately a “pump on” light beam and a “pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is alternatingly a “pump on” light beam and a “pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the “pump on” light beam and the “pump off light beam to the at least one spectrometer, and (f) a computer.

    ACCURATE RAMAN SPECTROSCOPY
    4.
    发明公开
    ACCURATE RAMAN SPECTROSCOPY 审中-公开

    公开(公告)号：US20240085333A1

    公开(公告)日：2024-03-14

    申请号：US18452494

    申请日：2023-08-18

    Applicant: NOVA LTD.

    Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon YALOV ,  Gilad BARAK

    IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

    CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/06113 ,  G01N2201/0636

    Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

    Hybrid metrology method and system
    6.
    发明授权
    Hybrid metrology method and system 有权

    公开(公告)号：US11150190B2

    公开(公告)日：2021-10-19

    申请号：US16945975

    申请日：2020-08-03

    Applicant: NOVA LTD.

    Inventor： Gilad Barak ,  Yanir Hainick ,  Yonatan Oren

    IPC: G01N21/65 ,  G01B11/06 ,  G01N21/95 ,  G03F7/20 ,  H01L21/66 ,  G01L1/24

    Abstract: A method and system are presented for use in measuring characteristic(s) of patterned structures. The method utilizes processing of first and second measured data, wherein the first measured data is indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of illuminating and/or collected light conditions corresponding to the characteristic(s) to be measured, and the second measured data comprises at least one spectrum obtained from the patterned structure in Optical Critical Dimension (OCD) measurement session. The processing comprises applying model-based analysis to the at least one Raman spectrum and the at least one OCD spectrum, and determining the characteristic(s) of the patterned structure under measurements.

    Accurate Raman spectroscopy
    8.
    发明授权
    Accurate Raman spectroscopy 有权

    公开(公告)号：US11740183B2

    公开(公告)日：2023-08-29

    申请号：US17759031

    申请日：2020-11-24

    Applicant: NOVA LTD.

    Inventor： Elad Schleifer ,  Yonatan Oren ,  Amir Shayari ,  Eyal Hollander ,  Valery Deich ,  Shimon Yalov ,  Gilad Barak

    IPC: G01J3/44 ,  G01N21/65 ,  G01J3/02

    CPC classification number: G01N21/65 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/4412 ,  G01N2201/0636 ,  G01N2201/06113

    Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

    Accurate Raman spectroscopy
    9.
    发明授权
    Accurate Raman spectroscopy 有权

    公开(公告)号：US11415519B2

    公开(公告)日：2022-08-16

    申请号：US17020587

    申请日：2020-09-14

    Applicant: NOVA LTD.

    Inventor： Eyal Hollander ,  Gilad Barak ,  Elad Schleifer ,  Yonatan Oren ,  Amir Shayari

    IPC: G01J3/44 ,  G01N21/65

    Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up

    Optical technique for material characterization
    10.
    发明授权
    Optical technique for material characterization 有权

    公开(公告)号：US12298182B2

    公开(公告)日：2025-05-13

    申请号：US18600698

    申请日：2024-03-09

    Applicant: NOVA LTD.

    Inventor： Gilad Barak ,  Yonatan Oren

    IPC: G01J3/44 ,  G01J3/02 ,  G01J3/06 ,  G01J3/10 ,  G01J3/28

    Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spots at multiple locations on a sample or from an elongated line-shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.

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