Invention Grant
- Patent Title: Top-gate doped thin film transistor
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Application No.: US17826550Application Date: 2022-05-27
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Publication No.: US11862730B2Publication Date: 2024-01-02
- Inventor: Abhishek A. Sharma , Sean T. Ma , Van H. Le , Jack T. Kavalieros , Gilbert Dewey
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/423 ; H01L29/06 ; H01L29/66 ; H01L29/49

Abstract:
Described is a thin film transistor which comprises: a dielectric comprising a dielectric material; a first structure adjacent to the dielectric, the first structure comprising a first material; a second structure adjacent to the first structure, the second structure comprising a second material wherein the second material is doped; a second dielectric adjacent to the second structure; a gate comprising a metal adjacent to the second dielectric; a spacer partially adjacent to the gate and the second dielectric; and a contact adjacent to the spacer.
Public/Granted literature
- US20220328697A1 TOP-GATE DOPED THIN FILM TRANSISTOR Public/Granted day:2022-10-13
Information query
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