Invention Grant
- Patent Title: Composite ion source based upon heterogeneous metal-metal fluoride system
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Application No.: US17715690Application Date: 2022-04-07
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Publication No.: US11887806B2Publication Date: 2024-01-30
- Inventor: Graham Wright , Ryan C. Prager
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDW Firm PLLC
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/317 ; C23C14/48 ; H01J37/05
Abstract:
An ion source is provided. The ion source may include an ion chamber to generate an ion beam comprising a metal ion species; and a charge source, coupled to deliver a metal vapor to the ion chamber, the charge source including a charge mixture. The charge mixture may include a first portion, comprising an elemental metal; and a second portion, comprising a heterogeneous metal fluoride compound.
Public/Granted literature
- US20230326703A1 COMPOSITE ION SOURCE BASED UPON HETEROGENEOUS METAL-METAL FLUORIDE SYSTEM Public/Granted day:2023-10-12
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