Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus and electronic device manufacturing method
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Application No.: US18052129Application Date: 2022-11-02
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Publication No.: US11924955B2Publication Date: 2024-03-05
- Inventor: Yoshiyuki Honda
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP 21213007 2021.12.27
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/00 ; G21K1/06

Abstract:
An extreme ultraviolet light generation apparatus includes a target supply unit configured to output a droplet target into a chamber device, a prepulse laser light irradiation system configured to irradiate the droplet target with prepulse laser light having linear polarization to generate a diffusion target, and a main pulse laser light irradiation system configured to irradiate the diffusion target with main pulse laser light to generate extreme ultraviolet light. Here, a cross section perpendicular to an optical axis of the main pulse laser light when being radiated to the diffusion target having a shape longer in a polarization direction of the prepulse laser light when being radiated to the droplet target than in directions other than the polarization direction.
Public/Granted literature
- US20230292426A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2023-09-14
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