Invention Grant
- Patent Title: Apparatuses including elongate pillars of access devices
-
Application No.: US17643316Application Date: 2021-12-08
-
Publication No.: US11925014B2Publication Date: 2024-03-05
- Inventor: Song Guo , Sanh D. Tang , Shen Hu , Yan Li , Nicholas R. Tapias
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: G11C11/24
- IPC: G11C11/24 ; G11C11/408 ; H10B12/00

Abstract:
A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.
Public/Granted literature
- US20220102351A1 APPARATUSES INCLUDING ELONGATE PILLARS OF ACCESS DEVICES Public/Granted day:2022-03-31
Information query