Invention Grant
- Patent Title: Method for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer
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Application No.: US16957064Application Date: 2018-12-21
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Publication No.: US11938515B2Publication Date: 2024-03-26
- Inventor: Fabian Goericke , Stefon Shelton , Benedict Costello
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Agency: DLA Piper LLP (US)
- International Application: PCT/US2018/067260 2018.12.21
- International Announcement: WO2019/126729A 2019.06.27
- Date entered country: 2020-06-22
- Main IPC: B06B1/06
- IPC: B06B1/06 ; H10N30/04

Abstract:
The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.
Public/Granted literature
- US20200338592A1 Method for Tuning the Resonant Frequency of a Piezoelectric Micromachined Ultrasonic Transducer Public/Granted day:2020-10-29
Information query
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