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    Method for Tuning the Resonant Frequency of a Piezoelectric Micromachined Ultrasonic Transducer
    1.
    发明公开
    Method for Tuning the Resonant Frequency of a Piezoelectric Micromachined Ultrasonic Transducer 审中-公开

    公开(公告)号：US20240157398A1

    公开(公告)日：2024-05-16

    申请号：US18423200

    申请日：2024-01-25

    Applicant: InvenSense, Inc.

    Inventor： Stefon Shelton ,  Fabian Goericke ,  Benedict Costello

    IPC: B06B1/06 ,  H10N30/04

    CPC classification number: B06B1/0629 ,  B06B1/0651 ,  B06B1/0666 ,  B06B1/0685 ,  H10N30/04 ,  Y10T29/42

    Abstract: The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.

    Miniature ultrasonic transducer package
    4.
    发明授权
    Miniature ultrasonic transducer package 有权

    公开(公告)号：US11508346B2

    公开(公告)日：2022-11-22

    申请号：US15987824

    申请日：2018-05-23

    Applicant: Invensense, Inc.

    Inventor： Stefon Shelton ,  Andre Guedes ,  David Horsley

    IPC: G10K9/22 ,  G10K9/122

    Abstract: A package design for a micromachined ultrasound transducer (MUT) utilizing curved geometry to control the presence and frequency of acoustic resonant modes is described. The approach consists of reducing in number and curving the reflecting surfaces present in the package cavity to adjust the acoustic resonant frequencies to locations outside the band of interest. The design includes a cavity characterized by a curved geometry and a MUT mounted to a side of a substrate facing the cavity with a sound emitting portion of the MUT facing an opening in the substrate. The substrate is disposed over an opening of the cavity with the substrate oriented such that the MUT located within the cavity.

    Apparatus and system for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer
    7.
    发明授权
    Apparatus and system for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer 有权

    公开(公告)号：US12226801B2

    公开(公告)日：2025-02-18

    申请号：US18423200

    申请日：2024-01-25

    Applicant: InvenSense, Inc.

    Inventor： Stefon Shelton ,  Fabian Goericke ,  Benedict Costello

    IPC: B06B1/06 ,  H10N30/04

    Abstract: The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.

    Method for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer
    8.
    发明授权
    Method for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer 有权

    公开(公告)号：US11938515B2

    公开(公告)日：2024-03-26

    申请号：US16957064

    申请日：2018-12-21

    Applicant: InvenSense, Inc.

    Inventor： Fabian Goericke ,  Stefon Shelton ,  Benedict Costello

    IPC: B06B1/06 ,  H10N30/04

    CPC classification number: B06B1/0629 ,  B06B1/0651 ,  B06B1/0666 ,  B06B1/0685 ,  H10N30/04 ,  Y10T29/42

    Abstract: The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.

    ULTRASONIC DIRECT ECHO PATH REDUCTION
    9.
    发明公开
    ULTRASONIC DIRECT ECHO PATH REDUCTION 审中-公开

    公开(公告)号：US20230152433A1

    公开(公告)日：2023-05-18

    申请号：US17987151

    申请日：2022-11-15

    Applicant: InvenSense, Inc.

    Inventor： Tony LEI ,  Joe Youssef ,  Daniela Hall ,  Ben Eovino ,  Stefon Shelton

    IPC: G01S7/521 ,  G05D1/02 ,  G01S15/931 ,  G01S15/08

    CPC classification number: G01S7/521 ,  G05D1/0255 ,  G01S15/931 ,  G01S15/08 ,  G01S2015/937

    Abstract: A robotic cleaning appliance includes a housing to which is coupled a surface treatment item and a sensor assembly with first and second transducers and an acoustic interface. The first sonic transducer transmits sonic signals through an acoustic interface and out of a first acoustic opening toward a surface beneath the robotic cleaning appliance. The sonic signals reflect from the surface as corresponding returned signals received by the second sonic transducer via a second acoustic opening port of the acoustic interface. A first plurality of annular rings is defined in the external surface around the first acoustic opening port and a second plurality of annular rings is defined in the external surface around the second acoustic opening port. The pluralities of annular rings attenuate direct path echoes from a subset of the transmitted sonic signals which attempt to travel across the external surface to the second acoustic opening port.

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