Invention Grant
- Patent Title: Ion beam irradiation apparatus and program therefor
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Application No.: US17835875Application Date: 2022-06-08
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Publication No.: US11955311B2Publication Date: 2024-04-09
- Inventor: Shinya Takemura
- Applicant: NISSIN ION EQUIPMENT CO., LTD.
- Applicant Address: JP Koka
- Assignee: NISSIN ION EQUIPMENT CO., LTD.
- Current Assignee: NISSIN ION EQUIPMENT CO., LTD.
- Current Assignee Address: JP Koka
- Agency: Sughrue Mion, PLLC
- Priority: JP 19057092 2019.03.25 JP 19194959 2019.10.28
- Main IPC: H01J37/08
- IPC: H01J37/08 ; G06N20/00 ; H01J37/304 ; H01J37/305 ; H01J37/317

Abstract:
An ion beam irradiation apparatus includes modules for generating an ion beam according to a recipe, and a control device. The control device receives the recipe including a processing condition for new processing, reads, from a monitored value storage, a monitored value that indicates a state of a module during a last processing immediately before the new processing, inputs the processing condition and the monitored value to a trained machine learning algorithm and receives, as an output from the trained machine learning algorithm, an initial value for the module, and outputs the initial value to the module to set up the module for generating the ion beam.
Public/Granted literature
- US20220301817A1 ION BEAM IRRADIATION APPARATUS AND PROGRAM THEREFOR Public/Granted day:2022-09-22
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