Invention Grant
- Patent Title: Ion generation device and ion generation method
-
Application No.: US17201436Application Date: 2021-03-15
-
Publication No.: US11978608B2Publication Date: 2024-05-07
- Inventor: Yuuji Ishida
- Applicant: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- Current Assignee: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP 20047762 2020.03.18
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/18 ; H01J37/317 ; H01J37/32

Abstract:
There is provided an ion generation device including a plasma generation chamber that generates a plasma for extracting an ion, and a heating device configured to heat the plasma generation chamber by irradiating a member that defines the plasma generation chamber or a member that is to be exposed to the plasma generated inside the plasma generation chamber with a laser beam.
Public/Granted literature
- US20210296078A1 ION GENERATION DEVICE AND ION GENERATION METHOD Public/Granted day:2021-09-23
Information query