Invention Grant
- Patent Title: Injector
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Application No.: US17142790Application Date: 2021-01-06
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Publication No.: US11993847B2Publication Date: 2024-05-28
- Inventor: Chris G. M. de Ridder , Klaas P. Boonstra , Theodorus G. M. Oosterlaken
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/40
- IPC: C23C16/40 ; C23C16/00 ; C23C16/455

Abstract:
An injector configured to be placed in a process chamber of a batch furnace assembly for injecting a gas into said process chamber. The injector has an elongated, tubular housing enclosing an injection chamber. The housing has a gas inlet opening for supplying a gas from a gas source to the injection chamber, at least one gas supply opening for supplying the gas from the injection chamber into the process chamber, and a circumferential wall extending in a longitudinal direction of the housing. The circumferential wall comprises a first lateral wall half and a second lateral wall half. Both lateral wall halves substantially span a length of the housing in the longitudinal direction. The first and second lateral wall halves are fastened to each other by means of mechanical fastening.
Public/Granted literature
- US20210207270A1 INJECTOR Public/Granted day:2021-07-08
Information query
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