Invention Grant
- Patent Title: Etching device for silicon core wire and etching method for silicon core wire
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Application No.: US17766651Application Date: 2020-09-04
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Publication No.: US11998955B2Publication Date: 2024-06-04
- Inventor: Junya Sakai , Takuya Yokose
- Applicant: TOKUYAMA CORPORATION
- Applicant Address: JP Yamaguchi
- Assignee: TOKUYAMA CORPORATION
- Current Assignee: TOKUYAMA CORPORATION
- Current Assignee Address: JP Yamaguchi
- Agency: Casimir Jones, S.C.
- Agent Robert A. Goetz
- Priority: JP 19200799 2019.11.05
- International Application: PCT/JP2020/033525 2020.09.04
- International Announcement: WO2021/090565A 2021.05.14
- Date entered country: 2022-04-05
- Main IPC: B08B3/04
- IPC: B08B3/04 ; B08B13/00 ; C01B33/02 ; C01B33/021 ; C01B33/037

Abstract:
A device is provided which is capable of evenly etching the entire surface of a silicon core wire. An etching device (1) for a silicon core wire (C1, C2, C3) includes: an etching bath (11, 12) for holding an etching solution (L1, L2); and a plurality of core wire support members (31) for supporting the silicon core wire (C1, C2, C3), the plurality of core wire support members (31) each having a hole (31A) through which the silicon core wire (C1, C2, C3) is to pass; and a position change mechanism (40) for changing a relative position where the silicon core wire (C1, C2, C3) passes through in relation to the hole (31A).
Public/Granted literature
- US20230124413A1 ETCHING DEVICE FOR SILICON CORE WIRE AND ETCHING METHOD FOR SILICON CORE WIRE Public/Granted day:2023-04-20
Information query
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