Invention Grant
- Patent Title: Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
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Application No.: US17967927Application Date: 2022-10-18
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Publication No.: US12034433B2Publication Date: 2024-07-09
- Inventor: Tetsuya Otsuki , Tsugio Ide
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP 17058706 2017.03.24
- Main IPC: H03H9/215
- IPC: H03H9/215 ; B81B3/00 ; B81B7/00 ; G01C19/56 ; G01C19/5621 ; H03B5/32 ; H03H3/007 ; H03H9/02 ; H03H9/05 ; H03H9/10 ; H03H9/17 ; H03H9/19 ; H03L1/02 ; H03L1/04
Abstract:
A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.
Public/Granted literature
- US20230040197A1 Vibrator Device, Oscillator, Gyro Sensor, Electronic Apparatus, And Vehicle Public/Granted day:2023-02-09
Information query
IPC分类:
