Invention Grant
- Patent Title: Wire bonding apparatus
-
Application No.: US17913441Application Date: 2021-02-22
-
Publication No.: US12057427B2Publication Date: 2024-08-06
- Inventor: Osamu Kakutani , Shigeru Hayata
- Applicant: SHINKAWA LTD.
- Applicant Address: JP Tokyo
- Assignee: SHINKAWA LTD.
- Current Assignee: SHINKAWA LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- International Application: PCT/JP2021/006549 2021.02.22
- International Announcement: WO2022/176182A 2022.08.25
- Date entered country: 2022-09-22
- Main IPC: B23K20/00
- IPC: B23K20/00 ; B23K20/10 ; H01L23/00 ; B23K101/40

Abstract:
A wire bonding apparatus (100) includes a bonding stage (12), a bonding head (20), an XY driving mechanism (30), and a frame (50). The XY driving mechanism (30) includes: an X-direction guide (31) installed to the frame (50); an X-direction slider (32), supported by the X-direction guide (31) and moving in the X direction, an X-direction mover (41) being installed thereto; a Y-direction guide (33) installed to a lower side of the X-direction slider (32); and a Y-direction slider (34), supported by the Y-direction guide (33) and moving in the Y direction, the bonding head (20) being installed thereto. The XY driving mechanism (30) is installed to the frame (50), so that a portion of the Y-direction guide (33) is overlapped with a mounting surface (12a) of a bonding stage (12) above the mounting surface (12a) and behind the mounting stage (12) in the Y direction.
Public/Granted literature
- US20230125756A1 WIRE BONDING APPARATUS Public/Granted day:2023-04-27
Information query