Invention Grant
- Patent Title: Dual source injector with switchable analyzing magnet
-
Application No.: US18481111Application Date: 2023-10-04
-
Publication No.: US12112918B2Publication Date: 2024-10-08
- Inventor: Wilhelm Platow , Neil Bassom
- Applicant: Axcelis Technologies, Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01J37/317
- IPC: H01J37/317 ; G21K5/04 ; H01J37/147 ; H01L21/04

Abstract:
An ion implantation system has a mass analyzing magnet having interior and exterior region and defining a first entrance, second entrance, and an exit. A first ion source defines a first ion beam directed toward the first entrance along a first beam path. A second ion source defines a second ion beam directed toward the second entrance along a second beam path. A magnet current source supplies a magnet current to the mass analyzing magnet. Magnet control circuitry controls a polarity of the magnet current based on a formation of the first or second ion beam. The mass analyzing magnet mass analyzes the respective first or second ion beam to define defining a mass analyzed ion beam along a mass analyzed beam path. At least one shield in the interior or exterior region prevents line-of-sight between the first and second ion sources. Beamline components modify the mass analyzed ion beam.
Public/Granted literature
- US20240029998A1 DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET Public/Granted day:2024-01-25
Information query