Invention Grant
- Patent Title: Self-aligned contacts for thin film transistors
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Application No.: US16638301Application Date: 2017-09-29
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Publication No.: US12183831B2Publication Date: 2024-12-31
- Inventor: Van H. Le , Abhishek A. Sharma , Benjamin Chu-Kung , Gilbert Dewey , Ravi Pillarisetty , Miriam R. Reshotko , Shriram Shivaraman , Li Huey Tan , Tristan A. Tronic , Jack T. Kavalieros
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt P.C.
- International Application: PCT/US2017/054368 WO 20170929
- International Announcement: WO2019/066912 WO 20190404
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L29/40 ; H01L29/417

Abstract:
Embodiments herein describe techniques for a semiconductor device, which may include a substrate, and a U-shaped channel above the substrate. The U-shaped channel may include a channel bottom, a first channel wall and a second channel wall parallel to each other, a source area, and a drain area. A gate dielectric layer may be above the substrate and in contact with the channel bottom. A gate electrode may be above the substrate and in contact with the gate dielectric layer. A source electrode may be coupled to the source area, and a drain electrode may be coupled to the drain area. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20200227568A1 SELF-ALIGNED CONTACTS FOR THIN FILM TRANSISTORS Public/Granted day:2020-07-16
Information query
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