Invention Grant
- Patent Title: Electron microscope
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Application No.: US17758363Application Date: 2021-12-03
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Publication No.: US12224153B2Publication Date: 2025-02-11
- Inventor: Shuai Li
- Applicant: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Applicant Address: CN Beijing
- Assignee: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Current Assignee: FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN202011393110.0 20201202
- International Application: PCT/CN2021/135541 WO 20211203
- International Announcement: WO2022/083789 WO 20220428
- Main IPC: H01J37/24
- IPC: H01J37/24 ; H01J37/14 ; H01J37/147 ; H01J37/244 ; H01J37/26 ; H01J37/28

Abstract:
An electron microscope includes: an electron source, which is configured to generate an electron beam; a first beam conduit, which is configured to accelerate the electron beam; a second beam conduit, which is configured to accelerate the electron beam; a first detector, which is disposed between the first beam conduit and the second beam conduit and configured to receive secondary electrons generated by the electron beam acting on a sample to be tested; and a control electrode, which is disposed between the first detector and an optical axis of the electron beam and configured to change the direction of movement of backscattered electrons and the secondary electrons generated by the electron beam acting on said sample.
Public/Granted literature
- US20230028903A1 ELECTRON MICROSCOPE Public/Granted day:2023-01-26
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