Invention Grant
- Patent Title: Creating multiple electron beams with a photocathode film
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Application No.: US17830244Application Date: 2022-06-01
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Publication No.: US12283453B2Publication Date: 2025-04-22
- Inventor: Xinrong Jiang , Youfei Jiang , Michael Steigerwald , Ralph Nyffenegger
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: HUSE IP Law
- Main IPC: H01J37/073
- IPC: H01J37/073 ; H01J37/12 ; H01J37/14 ; H01J37/147 ; H01J37/22 ; H01J37/28

Abstract:
An electron-beam device includes a laser and a photocathode film. The photocathode film has a front side and a back side and emits a plurality of electron beamlets when illuminated from the back side using the laser. The electron-beam device also includes electrodes to extract the plurality of electron beamlets from the front side of the photocathode film and to control shapes of the plurality of electron beamlets.
Public/Granted literature
- US20230395349A1 Creating Multiple Electron Beams with a Photocathode Film Public/Granted day:2023-12-07
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