- Patent Title: Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product
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Application No.: US17663323Application Date: 2022-05-13
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Publication No.: US12340973B2Publication Date: 2025-06-24
- Inventor: Stefan Schubert , Dieter Schumacher , Erik Essers , Ingo Mueller , Arne Thoma , Joerg Jacobi , Wilhelm Bolsinger , Dirk Zeidler
- Applicant: Carl Zeiss MultiSEM GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102019008249.4 20191127
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/04 ; H01J37/147 ; H01J37/244 ; H01J37/317

Abstract:
A particle beam system, such as a multi-beam particle microscope, includes a multi-beam deflection device and a beam stop. The multi-beam deflection device is arranged in the particle-optical beam path downstream of the multi-beam generator and upstream of the beam switch of the particle beam system. The multi-beam deflection device serves collectively blanks a multiplicity of charged individual particle beams. These impinge on a beam stop, which is arranged in the particle-optical beam path level with a site at which a particle beam diameter is reduced or is at a minimum. By way of example, such sites are the cross-over plane of the individual particle beams or an intermediate image plane. Associated methods for operating the particle beam system and associated computer program products are disclosed.
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