Invention Application
- Patent Title: Electron microscope and spectroscopy system
- Patent Title (中): 电子显微镜和光谱系统
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Application No.: US10211558Application Date: 2002-08-05
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Publication No.: US20030053048A1Publication Date: 2003-03-20
- Inventor: Robert Bennett , Andrew Mark Woolfrey , John Charles Clifford Day , Angus Bewick
- Applicant: RENISHAW PLC
- Applicant Address: GB Gloucestershire
- Assignee: RENISHAW PLC
- Current Assignee: RENISHAW PLC
- Current Assignee Address: GB Gloucestershire
- Priority: GB9809835.3 19980509; GB9809834.6 19980509; GB0118981.0 20010803
- Main IPC: G01J003/44
- IPC: G01J003/44

Abstract:
An electron microscope 10 is adapted to enable spectroscopic analysis of a sample 16. A parabolic mirror 18 has a central aperture 20 through which the electron beam can pass. The mirror 18 focuses laser illumination from a transverse optical path 24 onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system 30. The mirror 18 is retractable (within the vacuum of the electron microscope) by a sliding arm assembly 22.
Public/Granted literature
- US06885445B2 Electron microscope and spectroscopy system Public/Granted day:2005-04-26
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