Invention Application
- Patent Title: Thin-film transistor and method of making same
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Application No.: US10377732Application Date: 2003-03-04
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Publication No.: US20030164520A1Publication Date: 2003-09-04
- Inventor: Byung-Chul Ahn , Hyun-Sik Seo
- Applicant: LG LCD Inc.
- Applicant Address: null
- Assignee: LG LCD Inc.
- Current Assignee: LG LCD Inc.
- Current Assignee Address: null
- Priority: KR97-07010 19970304
- Main IPC: H01L027/01
- IPC: H01L027/01

Abstract:
A thin-film transistor includes a substrate, and a gate including a double-layered structure having first and second metal layers provided on the substrate, the first metal layer being wider than the second metal layer by 1 to 4 nullm. A method of making such a thin-film transistor includes the steps of: depositing a first metal layer on a substrate, depositing a second metal layers directly on the first metal layer; forming a photoresist having a designated width on the second metal layer; patterning the second metal layer via isotropic etching using the photoresist as a mask; patterning the first metal layer by means of an anisotropic etching using the photoresist as a mask, the first metal layer being etched to have the designated width, thus forming a gate having a laminated structure of the first and second metal layers; and removing the photoresist.
Public/Granted literature
- US06815321B2 Thin-film transistor and method of making same Public/Granted day:2004-11-09
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