Invention Application
- Patent Title: MICROELECTRONIC PACKAGES HAVING STACKED ACCELEROMETER AND MAGNETOMETER DIE AND METHODS FOR THE PRODUCTION THEREOF
- Patent Title (中): 具有堆叠加速度计和磁铁计的微电子封装及其生产方法
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Application No.: US14806481Application Date: 2015-07-22
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Publication No.: US20150329352A1Publication Date: 2015-11-19
- Inventor: PHILIP H. BOWLES , STEPHEN R. HOOPER
- Applicant: FREESCALE SEMICONDUCTOR INC.
- Applicant Address: US TX AUSTIN
- Assignee: FREESCALE SEMICONDUCTOR INC.
- Current Assignee: FREESCALE SEMICONDUCTOR INC.
- Current Assignee Address: US TX AUSTIN
- Main IPC: B81B7/00
- IPC: B81B7/00

Abstract:
Methods for fabricating multi-sensor microelectronic packages and multi-sensor microelectronic packages are provided. In one embodiment, the method includes positioning a magnetometer wafer comprised of an array of non-singulated magnetometer die over an accelerometer wafer comprised of an array of non-singulated accelerometer die. The magnetometer wafer is bonded to the accelerometer wafer to produce a bonded wafer stack. The bonded wafer stack is then singulated to yield a plurality of multi-sensor microelectronic packages each including a singulated magnetometer die bonded to a singulated accelerometer die.
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