Diurethane (meth)acrylate-silane precursor compounds prepared by reacting a primary or secondary aminosilane with a cyclic carbonate to yield a hydroxylalkylene-carbamoylalkylene-alkoxysilanes (referred to as a “hydroxylcarbamoylsilane”), which is reacted with a (meth)acrylated material having isocyanate functionality, either neat or in solvent, and optionally with a catalyst, such as a tin compound. Also described are articles including a substrate, a base (co)polymer layer on a major surface of the substrate, an oxide layer on the base (co)polymer layer; and a protective (co)polymer layer on the oxide layer, the protective (co)polymer layer including the reaction product of at least one diurethane (meth)acrylate-silane precursor compound. The substrate may be a (co)polymer film or an electronic device such as an organic light emitting device, electrophoretic light emitting device, liquid crystal display, thin film transistor, or combination thereof. Methods of making the diurethane (meth)acrylate-silane and their use in composite films and electronic devices are described.