Invention Application
- Patent Title: SILICON-CONTAINING UNDERLAYERS
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Application No.: US15254935Application Date: 2016-09-01
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Publication No.: US20180059547A1Publication Date: 2018-03-01
- Inventor: Charlotte A. Cutler , Suzanne M. Coley , Owendi Ongayi , Christopher P. Sullivan , Paul J. LaBeaume , Li Cui , Shintaro Yamada , Mingqi Li , James F. Cameron
- Applicant: Rohm and Haas Electronic Materials LLC
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/16 ; G03F7/42 ; G03F7/20 ; G03F7/30 ; C08G77/04 ; C09D5/20 ; C09D183/04 ; C08F20/14 ; C08F24/00 ; C08G73/12 ; C08F20/32 ; C08G67/00 ; C08F20/28
Abstract:
Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si—O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.
Public/Granted literature
- US10114288B2 Silicon-containing underlayers Public/Granted day:2018-10-30
Information query
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