Invention Application
- Patent Title: SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE
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Application No.: US17561268Application Date: 2021-12-23
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Publication No.: US20220203411A1Publication Date: 2022-06-30
- Inventor: Fumitoshi Oikawa , Koichi Fukaya , Erina Baba , Shuichi Suemasa , Hisajiro Nakano
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2020-218355 20201228
- Main IPC: B08B3/12
- IPC: B08B3/12 ; B08B3/02 ; B08B1/04

Abstract:
A substrate cleaning device includes a rotation mechanism that rotates the substrate, a first cleaning solution supply nozzle that discharges a cleaning solution to which ultrasonic vibration is applied to the surface of the substrate, and a swing mechanism that swings the first cleaning solution supply nozzle from a vicinity of a rotation center of the substrate toward an outer peripheral edge of the substrate in a range narrower than a half-surface of the substrate.
Information query
IPC分类: