METHOD OF FILLING A MICROCAVITY WITH A POLYMER MATERIAL, A FILLER IN A MICROCAVITY, AND AN APPARATUS FOR FILLING A MICROCAVITY ON OR IN A SUBSTRATE WITH A POLYMER MATERIAL
Abstract:
A method of filling a microcavity with layers of a polymer material includes the following steps: (A) estimating a current vertical position of a bottom of the microcavity (current bottom position); (B) lowering the capillary tube into the microcavity towards the current bottom position; (C) dispensing a polymer composition from a tube outlet of the capillary tube under a dispensing applied pressure until the polymer composition substantially fills the microcavity; (D) curing a work piece including the microcavity and the polymer composition in the microcavity to obtain a current layer of the polymer material; and (E) repeatedly executing steps (A), (B), (C), and (D), until the layers of the polymer material have substantially filled the microcavity.
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